www.mrsec.harvard.edu/education/ap298r2004/Vlassak AP298presentation.pdf
Origin of residual stresses in thin films. ? Epitaxial stresses. ? Thermal stresses. ? Intrinsic or growth stresses. - surface stress effects. - crystallite coalescence ...
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flipchips.com/tutorial/process/controlling-stress-in-thin-films/
Stress in thin films results from differences in thermal expansion (thermal stress) or from the microstructure of the deposited film (intrinsic stress). At substrate ...
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books.google.com/books/about/Thin_Film_Materials.html?id=9UNnzNYAkboC
This book provides comprehensive coverage of stress, defect formation and surface evolution in thin films. With its balanced coverage of theory, experiment and ... |
www.seas.harvard.edu/hutchinson/papers/462-5.pdf
Stresses in thin films and multilayers have three primary origins: intrinsic, .... Several models for mechanisms which give rise to tensile stresses in thin film ...
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microlab.berkeley.edu/labmanual/chap8/flexus.pdf
Flexus (Tencor FLX-2320) is a thin-film stress measurement instrument. ... This document describes the procedures of measuring thin-film stress and how to set ...
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www.ee.duke.edu/~flu/index_files/Brief overview of residual stress in thin films.pdf
1. Physical mechanisms of residual stress in metallic thin films. - A review of the literature -. February 19th, 2008. Felix Lu. Applied Quantum Technologies / Duke ...
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www.amazon.com/Thin-Film-Materials-Formation-Evolution/dp/0521822815
'The book is a landmark in a rich subject which has seen many developments over the past decade. In addition to being beautifully written, the book contains ...
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scholarcommons.usf.edu/cgi/viewcontent.cgi?article=1557&context=etd
6-1-2008. Stress analysis and mechanical characterization of thin films for microelectronics and MEMS applications. Patrick Waters. University of South Florida ... |
www.sccs.swarthmore.edu/users/00/heather/finalpres.ppt
Stresses in Thin Films Final Presentation. Cynthia Macht, Nick Svencer, Heather Stern. Tufts University, TAMPL. July 31, 1998. July 31, 1998. 2. Overview ...
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www-inst.eecs.berkeley.edu/~ee143/fa10/handouts/Stress_in_Thin_Films.pdf
Nevertheless, stress or strain does commonly exist in thin ?lms as a result of ... ter , we shall discuss the nature ofstress in thin ?lms, the chemical potential in a ... |
