sputtering yield

Mar 2, 2009 ... A Simple Sputter Yield Calculator ... Based on empirical equations for sputter yields at normal incidence by N. Matsunami, Y. Yamamura, ...

Mar 5, 2012 ... A new general, predictive semi-empirical equation for the sputtering yields of monoatomic elemental solids, using 250 eV to 10000 eV ions ...

The average number of atoms ejected from the target per incident ion is called the sputter yield and depends on the ion incident angle, the energy of the ion, the ...

Data from IPP Garching. W. Eckstein, MPIPP Garching, Germany. Book: Sputtering by Particle Bombardment Editors: R. Behrisch, W. Eckstein. Introduction and ...

The sputtering yield is calculated under the assumption of random slowing down in an infinite medium .... surface atoms account for the sputtering yield, whereas ...

Semicore Equipment, Inc. is a Silicon Valley based manufacturer and worldwide supplier of vacuum coating systems for the electronics, optical, solar energy, ...

An analysis is made of published sputtering yield data for compounds using argon primary ions at normal incidence to evaluate the validity of simple predictive ...

Sputter Yield Charts are available for many elements (Ar ions normal to the surface): Cu, Rh, Fe, Sn, V, Mo, Ti ¡¤ Zn, Mn, Ru, Co, B, Nb, C ¡¤ Cd, Au, Pt, Ge, U, Hf, Zr ...

Table 1 shows the sputtering yields S for some target materials for some of the standard primary ... Primary Ion: Ar+ ; Ion Energy = 1 keV; Sputter Yield S = 1 ...

In this article, we present a theoretical model describing the sputter yields ... sputtering yield, associated with the non-planar surface morphology, are strongly ...