en.wikipedia.org/wiki/Sputtering
On the other hand, it is commonly utilized for thin-film deposition, etching and analytical techniques (see below). A commercial sputtering system at Cornell ...
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www.ajaint.com/whatis.htm
The "diode sputtering" example given above has proven to be a useful technique in the deposition of thin films when the cathode is covered with source material ...
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reaktiveplasmen.rub.de/files/lehre/plasmaii/Kelly_MagnetronReview.pdf
this area, including the pulsed magnetron sputtering process, variable "eld magnetrons, and the combining ofsputtering techniques with other surface coating, ...
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en.wikipedia.org/wiki/Sputter_deposition
A target contains a large amount of material and is maintenance free making the technique suited for ultrahigh vacuum applications. Sputtering sources contain ... |
www.phasis.ch/index.php?option=com_content&view=article&id=57&Itemid=65
The off-axis radio frequency magnetron sputtering technique, schematically shown above, consists of a target, which is a plate of a stoichiometric mixture of the ...
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www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputtertech.html
simplest - basically what we have talked about so far. schematic of DC sputtering. Parameters: Argon Pressure. deposition rate vs. argon pressure; optimum ...
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www.mrs.org/august-2011-sputtering-technique/
Sputtering technique forms versatile quasicrystalline coatings. Opportunities. TA&T is interested in developing cooperative research and development efforts as ...
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groups.mrl.uiuc.edu/dvh/pdf/SFSsputter316.doc
Today, sputtering has grown to be the most widely used vacuum deposition technique, with applications in industry and experimental research. In industry ...
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www.recentonline.ro/031/Constantin_R31.pdf
Feb 26, 2011 ... sputtering technique are presented. The development, fundamental principles and applications of the magnetron sputtering process are ...
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www.springerlink.com/index/1lppxl4epefh0qcq.pdf
The Sputtering Technique. Koukou Suu. ULVAC Inc., 1220-1 Suyama, Susono, Shizuoka 410-1231, Japan koukou [email protected]. Abstract. In this chapter, the ... |
