pearton.mse.ufl.edu/rgw/II/II.1-SIMSTechnology/j-Sputteringrates.doc
We measured the sputtering rates and ion yields of a number of semiconductors, metals, and insulators under identical oxygen or cesium ion bombardment ...
|
www.quorumtech.com/pdf/SputterCoatingTechniques/Sputter_coating_technical_brief.pdf
Chapter 6 - Choice of Sputter Material .................................................................. 10. Chapter 7 - Rates of Sputtering.............................................................................. 11 ...
|
en.wikipedia.org/wiki/Sputtering
Reactive ions are frequently used in Secondary Ion Mass Spectrometry (SIMS) equipment to enhance the sputter rates. The mechanisms causing the sputtering ... |
www.specs.de/cms/upload/PDFs/IQE11-35/sputter-info.pdf
The sputtering velocity or ¡°sputter rate¡± z/t of a surface layer due to ion bombardment: z/t = M/(rNAe) x S jp. M: molar weight of the target [kg/mol] r: density of the ...
|
www.lesker.com/LeskerTech/Archives/0G11M3H/LeskerTech_V7_I1.pdf
Increasing Sputter Rates. When sputtering dielectric targets using RF power, it is quite possible for the maximum deposition rate on the substrate to be less than ...
|
www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputtertech.html
DC sputtering. simplest - basically what we have talked about so far. schematic of DC sputtering. Parameters: Argon Pressure. deposition rate vs. argon pressure ...
|
www.msi-pse.com/Sputtering Rates.htm
Jun 11, 2012 ... Home. &. Technical Data Sheet DS 000 100 02/08 SunSource? DC Sputtering Rates. DCSPUTTERING RATES ...
|
link.aip.org/link/?JAPIAU/109/084908/1
An analytical method is developed for determining net sputtering rate for an MgO layer under hot ions with low energy (<100 eV) in a neon-xenon discharge gas ...
|
www.springerlink.com/index/L546254U12G15602.pdf
sputtering rate on the cathode is always of great interest to scientists and engineers ... where Sions and Sneutrals are the sputtering rates due to ion and neutral ...
|
www.plasmaequip.com/Sputter Rates.pdf
SPUTTERING RATES. 1. Al Deposition Rate. 3500 Angstroms per minute at 600 Watts D.C.. 2. Pressure Range. 2 Microns ¨C 40 microns. 3. Target Size ... |
