en.wikipedia.org/wiki/Sputter_deposition
Main article: High Power Impulse Magnetron Sputtering. HIPIMS is a method for ...
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www.advanced-energy.com/upload/File/White_Papers/SL-WHITE4-270-01.pdf
of the highest-ticket items in the system. The power supply also is the system component directly responsible forsputtering the all-important coatings in a wide ...
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www.sciencedirect.com/science/article/pii/S0169433208024720
Feb 1, 2009 ... Titanium films were deposited on glass substrates at room temperature by direct current (dc) magnetron sputtering at fixed Ar pressure of 1.7 Pa ...
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shdl.mmu.edu.my/2170/1/1492.pdf
Sep 8, 2005 ... We investigated the effects of sputtering power and deposition pressure on ... high sputtering power favored the formation of continuous film.
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www.hvconcepts.com/pdf/DC Sputtering & Dual PS brochure doc 100705.pdf
Dual Independent Sputtering Power Supplies in One Package. Select any Two DC Supplies with a Total Power Sum of 2600 Watts or less. Delivery Less than 4 ...
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www.acreetech.com/index.php/coating-dev/70
In sputtering, high energy particles (ionized Ar) strike the surface of the target ... 2 ) A means of delivering power to the target ¨C we need to pass electricity through ... |
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Roughly three quarters of the power applied to a sputter gun ends up heating the coolant water. Understanding the heat transfer processes and heat dissipation ...
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liu.diva-portal.org/smash/get/diva2:22370/FULLTEXT01
is an Ar/Ti plasma created by a High Power Impulse Magnetron Sputtering .... I. ¡° Ionization of sputtered metals in high power pulsed magnetron sputtering¡± ...
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esl.ecsdl.org/content/5/1/A14.abstract
gas atmosphere with different radio-frequency magnetron sputtering power from 80 to 160 W with 20 W stepincrease. Lipon films deposited at lower sputtering ... |
iopscience.iop.org/0268-1242/9/6/014/pdf/0268-1242_9_6_014.pdf
sputtering power increases from 15 to 50 Wand then decreases with further ... transmittance or blackening of IT0 films deposited at high sputtering power. |
