www.ysxbcn.com/downPage.asp?softID=914&urlID=893
Influence of sputtering parameters on microstructure and mechanical properties of GeSbTe films. FU Yong-zhong(¸¶ÓÀÖÒ). Micro/Nano Science and Technology ...
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www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputtertech.html
DC sputtering. simplest - basically what we have talked about so far. schematic of DC sputtering. Parameters: Argon Pressure. deposition rate vs. argon pressure ...
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iopscience.iop.org/0022-3727/33/4/201
Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties. REVIEW ARTICLE ... |
en.wikipedia.org/wiki/Sputter_deposition
The availability of many parameters that control sputter deposition make it a complex process, but also allow experts a large degree of control over the growth ... |
ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4923696
The zinc doped indium oxide (IZO) films deposited with various sputter parameters such as, film thickness ranging from 200.
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www.advanced-energy.com/upload/File/Reprints/Pulsed-DC Reactive Sputtering of Dielectrics.pdf
choice of pulsing frequency and some details of pulsing parameter influences are described. Results are given for pulsed dc reactivesputtering of Al2O3 thin ...
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doc.utwente.nl/55578/
Lodder, J.C. and Wielinga, T. (1984) Influence of R.F. sputter parameters on the magnetic orientation of Co-Cr layers. IEEE Transactions on Magnetics, 20 (1). pp ...
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www.edax.com/download/Texture Inhomogeneity in Tantalum Sputter Targets-1.pdf
target atoms, and the surface binding energy of target atoms. While the relatively large number parameters affecting sputtering makes it a complex process, ...
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materion.com/ResourceCenter/NewsletterArchives/MicroelectronicsNewsletters/PVDMagnetronSputteringParametersandtheirEffect.aspx
PVD Magnetron Sputtering Parameters and their Effect. |
