en.wikipedia.org/wiki/Sputter_deposition
Gas flow sputtering makes use of the hollow cathode effect, the same effect by which hollow cathode lamps operate.
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www.arl.psu.edu/mm_mp_ac_sputtering.php
For sputtering, the energized particles are present as a glow diffuse plasma. A plasma is a partially ionized gasconsisting of positively charged particles ... |
www.msi-pse.com/magnetron_sputtering.htm
Jun 11, 2012 ... Inert gases, specfically argon, are usually employed as the sputtering gas because they tend not to react with the target material or combine ...
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www.wfu.edu/~ucerkb/Nan242/L07-Sputtering_a.pdf
attached to the anode. ? A plasma is created by ionizing a sputtering gas. ( generally a chemically inert, heavy gas like Argon). ? The sputtering gas bombards ...
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www.acreetech.com/index.php/component/content/article/70
At the same time a reactive gas can be added, such as nitrogen, which reacts with the deposited silicon forming silicon nitride. In sputtering, high energy ...
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idosi.org/wasj/wasj9(C&NT)10/2.pdf
Abstract: Effects of different sputtering gases and metallic thin films on the growth of carbon-based .... Effect ofSputtering Gas: Fig.1 shows the AFM images of ...
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answers.ask.com/Business/Constructions_and_Materials/how_do_i_fix_my_car_from_sputtering
mjp65aa: A sputtering car can be caused by several things including dirty air filter or dirty gas filter. Check those first. At store, buy can or bottle of dry gas (about ... |
www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputter.html
We are most interested in the first of these: target atoms going into the gas phase. Sputtering process. sputterprocess. momentum transfer process. involves top ...
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www.ajaint.com/whatis.htm
Although SPUTTERING as described above seems relatively intuitive, familiarization ... One can create this dynamic condition by metering a gas (e.g. Ar ) into a ...
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www.advanced-energy.com/upload/File/Reprints/Control of the Reac Sput Pro Using Two Reac Gasses.pdf
Reactive sputtering when two reactive gases are used presents special problems ... instability regions for two-gasreactive sputtering, and Martin and co-workers ... |
