en.wikipedia.org/wiki/Sputter_deposition
In reactive sputtering, the deposited film is formed by chemical reaction between the target material and a gas which is introduced into the vacuum chamber.
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www.ajaint.com/
AJA International, Inc. has delivered numerous dual chamber sputtering tools with load locks and cassettes for substrates up to 200 mm diameter. Chambers ...
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www.youtube.com/watch?v=A0IHvR0e6Ik
May 26, 2011 ... Sputtering is an extremely powerful technology. The system in the video is composed by a two sputtering chambers pumped to ultra high ...
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groups.mrl.uiuc.edu/dvh/pdf/SFSsputter316.doc
Our lab is equipped with a homebuilt Ultra High Vacuum (UHV) System which consists of two chambers equipped with a total of five sputtering guns, (two rf- and ... |
www.quorumtech.com/products/sputter-coaters-sem-carbon-coaters/q300r-t-triple-target-large-chamber-rotary-pumped-sputter-coater.html
Ideal for sputter coating large SEM specimens The Q300R T is ...
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www.ajaint.com/whatis.htm
A sputtering system configuration where multiple magnetron sputtering sources are arranged in a specific circular pattern and are aimed at a common focal point ...
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www.dca.fi/uhv sputtering.htm
Description of L400 ultra high vacuum magnetron sputtering system for UHV thin film deposition.
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nufab.northwestern.edu/sites/default/files/training/Sputtering - AJA Orion Sputter.pdf
1.0 AJA ORION SPUTTER SYSTEM. Figure 1: AJA Orion Sputter System. 1.1 Introduction. AJA Orion Sputter System deposits metal as well as dielectric films ...
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www.semicore.com/sputtering-systems
TriAxis Multi-Chamber Deposition System. Model #: SC1000. In-line Sputtering Equipment SC1000. Model #: SC1500. In-line Sputtering System SC1500 ...
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www.nano.iisc.ernet.in/RF sputtering manual_2010.pdf
Mar 1, 2010 ... Anelva SPF-322H sputtering system, shown in fig.1 is equipped with three ... sputtering chamberof this system is 2x10-5 milli bar. Magnetron ... |
