authors.library.caltech.edu/10463/1/BADjosa26.pdf
A NEW SPUTTERING APPARATUS. BY RICHARD M. BADGER. The writer, in sputtering a large number of mirrors, has found that the apparatus and methods to ...
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link.aip.org/link/?RSINAK/27/293/1
A simple sputtering apparatus that consistently deposits opaque films of nickel and the noble metals in 3 to 10 min has been made. The chamber is constructed ...
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mpserver.pst.qub.ac.uk/sites/icpig2011/289_D13_Sakudo.pdf
Sputter deposition apparatus combined with ion irradiation system immersed in plasma. N. SakudoP, N. IkenagaP, Y. Kurachi Y. KishiP, Z. Yajima. PKanazawa ...
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www.springerlink.com/index/lj8h8n2335452q16.pdf
Ion-beam sputtering apparatus for deposition of multilayered films. T. SUZUKI, T. YAMAZAKI, K. TAKAHASHI, T. KAGEYAMA, H. ODA. Department of Industrial ...
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iopscience.iop.org/0953-2048/16/10/314/
The performance of the planar magnetron sputtering apparatus with the use of a c-axis oriented single-domain Sm123 bulk superconductor with 60 mm in ...
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link.aip.org/link/?JVSTAL/2/178/1
A cylindrical geometry sputtering apparatus and associated fixtures have been described which feature ease of construction and use. Because of the high ...
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www.google.com/patents/US4417968
A cylindrical magnetron cathode sputtering apparatus for the simultaneous coating of a large number of articles or substrates, comprising an evacuable coating ...
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www.google.com/patents/US4356073
A rotatable magnetron cathode sputtering apparatus for operation within an evacuable chamber for coating substrates that are also contained within said ...
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ieeexplore.ieee.org/iel5/4915518/4955501/04955532.pdf?arnumber=4955532
High Capacity Sputtering Apparatus. E. C. Muly. Norton Research Corporation, Cambridge, Massachusetts and. A. J. Aronson. Norton Vacuum Equipment ... |
www.sciencedirect.com/science/article/pii/0042207X88905945
A planar magnetron sputtering apparatus with complex targets has been made for depositing high quality metal films onto various substrates. The apparatus can ... |
