sputter yield table

Sputter Yield Charts are available for many elements (Ar ions normal to the surface): ... The following includes some unit calculators as well as the periodic table ...

S: sputtering yield (atom/ion) jp: primary ion current density [A/m2]. The target parameters M and r can be found in the literature. Table 1 shows the sputtering ...

Mar 5, 2012 ... A new general, predictive semi-empirical equation for the sputtering yields of monoatomic elemental solids, using 250 eV to 10000 eV ions ...

Mar 2, 2009 ... A Simple Sputter Yield Calculator ... CREATE A TABLE: ... Based on empirical equations for sputter yields at normal incidence by N. Matsunami ...

Comparison of experimental and calculated values for the sputtering yield (new book); 2. ... 376 ion ¨C target combinations; Fitting parameters given in tables ...

The "Yield" data in the third column represents the number of target atoms sputtered (ejected from the target) per argon ion striking the target with a kinetic ...

The ion-induced sputtering yields from monatomic solids at normal incidence are presented graphically for various... Atomic Data and Nuclear Data Tables ...

The desorption cross sections measured as a function of energy for He and Ne ions are listed in Table I. These values can be converted to sputter yields by ...

Data are presented in Table 1 for 18 materials that include 9 semiconductors, ... The estimated error in the absolutesputtering yield S is larger because of a lack ...

sputtered, and it agrees with the number we saw in the. SPUTTERING YIELD table above. One comment should be made about the Surface Binding Energy.