en.wikipedia.org/wiki/Sputtering
Sputtering can also play a role in reactive ion etching (RIE), a plasma process carried out with ...
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web.utk.edu/~prack/Thin films/Etching.pdf
neutrals active species (radicals) are directed towards substrate. Philip D. Rack University of Tennessee. Dry Ethcing Nomenclature. Barrel. Sputter Etching. RIE ...
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www.oxfordplasma.de/process/sputetch.htm
OPT application lab: 120 nm Pt etch (and 400 nm PZT RIE), PR mask intact. An enhanced rate by reactive gases can be achieved at elevated temperatures: ... |
www.memsnet.org/mems/beginner/etch.html
Wet etching where the material is dissolved when immersed in a chemical solution; Dry etching where the material issputtered or dissolved using reactive ions ...
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www.essderc2002.deis.unibo.it/data/pdf/Coppens.pdf
sputter etch done on the top of the dielectric film of a metal-insulator-metal (MIM) ... distributions are obtained when asputter etch is included. However TXRF ...
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eprints.gla.ac.uk/1841/01/Phil.Trans.Ro.Soc.362(1814)125-138.pdf
Nov 25, 2003 ... Dry etching and sputtering. By C. D. W. Wilkinson1 and M. Rahman2. 1Department of Electronics and Electrical Engineering and. 2Department ...
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www.sciencedirect.com/science/article/pii/S0042207X79806430
Fibres of polyamide, polyester and an aromatic polyamide (Kevlar) have been subjected to Ar+ ion bombardment erosion in an ion accelerator or an rf discharge ...
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openlearn.open.ac.uk/mod/oucontent/view.php?id=397865¡ìion=8.3.2
8.3.2 Sputter etching: argon ion etching of gold. One commercial process for cutting inkjet printer nozzles uses sandblasting. Not surprisingly, the surface finish is ... |
pdf.directindustry.com/pdf/lk-technologies/sputter-etching-system-ion-gun-and-control-electronics/34978-35315.html
Company: LK Technologies; Catalogue: Sputter Etching System, Ion Gun and Control Electronics; Page: 1/2;
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store.dentonvacuum.com/deskvcoldsputtercoater.aspx
The Desk V HP is the perfect choice for electron microscopy sample preparation. |
