en.wikipedia.org/wiki/Sputter_cleaning
Sputter cleaning is the cleaning of a solid surface in a vacuum by using physical sputtering of the surface. Sputter cleaning is often used in vacuum deposition ...
|
ieeexplore.ieee.org/iel5/6040/32080/01492519.pdf?arnumber=1492519
after sputter cleaning with RF plasma, which favorably reacted with the deposited Cu. Heating of bonded samples in various environments might enhance or ...
|
www.sciencedirect.com/science/article/pii/S0257897297001898
The effect of sputtering the surface of a high-speed steel substrate with a neutral molecule source, after alkalinecleaning and boiling water dip-drying, on th.
|
www.springerlink.com/index/L8K505438121405K.pdf
cleaning in combination with sputtering are outlined and ... examples for sputter cleaning under a variety of con- ... In situ sputter-cleaning of solid surfaces for ...
|
www.jim.or.jp/journal/e/pdf3/51/02/246.pdf
Sputter cleaning of substrate helped to improve TiB2 ... This was achieved by introducing substratesputter-cleaning and then biasing for the early stage of ...
|
smif.lab.duke.edu/pdf/XPS1 Sputter Cleaning Procedure_rev3.pdf
Sputter Cleaning Procedure for XPS1. (Kratos Manual Section 5.6). It is suggested that you acquire a spectra before and after performing a sputter clean so ...
|
jap.aip.org/resource/1/japiau/v48/i3/p907_s1
It is concluded that for Ar+ ion sputter cleaning of silicon, the silicon should be kept at room temperature or below during sputtering to minimize residual surface ...
|
www.engr.sjsu.edu/sgleixner/mate129/Continuing Ed/Deposition/sputtering.pdf
Pre-surface sputter cleaning of surface and deposition/ etching processes to control uniformity are possible. CON: Certain sputtering systems (glow discharge ...
|
www.tectra.de/sputter.htm
Sep 8, 2007 ... IonEtch Sputter Gun: Ion Gun for Argon sample cleaning.
|
jmicro.oxfordjournals.org/content/47/3/223.abstract
Clean surfaces of aluminum obtained by repeated sputter-cleaning and annealing were observed using UHV-reflection electron microscopy (REM) equipped ... |
