en.wikipedia.org/wiki/Sputter_deposition
In reactive sputtering, the deposited film is formed by chemical reaction between the target material and a gas which is introduced into the vacuum chamber.
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groups.mrl.uiuc.edu/dvh/pdf/SFSsputter316.doc
Our lab is equipped with a homebuilt Ultra High Vacuum (UHV) System which consists of two chambers equipped with a total of five sputtering guns, (two rf- and ...
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www.euvlitho.com/2010/Optics-1.pdf
EUV Litho 2010. Virtual Sputter Chamber - Multiphysics Simulation of Magnetron Sputter & Deposition. Chris Walton, George Gilmer, Luis Zepeda-Ruiz, Matt ...
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www.ajaint.com/
AJA International, Inc. has delivered numerous dual chamber sputtering tools with load locks and cassettes for substrates up to 200 mm diameter. Chambers ...
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www.scm-inc.com/sputtering/maintenance
Target arcing, surface roughness in deposited films, and trace chemical impurities are often times linked to dirtysputter chambers, guns and targets.
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www.ajaint.com/whatis.htm
Sputtering Source. A tool to deposit thin film that mounts to a vacuum chamber by means of either flanges or feedthroughs and consists of a water cooled ...
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www.engr.sjsu.edu/sgleixner/mate129/Continuing Ed/Deposition/sputtering.pdf
In sputtering, the goal of the plasma is to generate ions. We will set a sustainable plasma (correct pressure of gas based on the chamber dimensions).
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nufab.northwestern.edu/sites/default/files/training/Sputtering - AJA Orion Sputter.pdf
Figure 3: Sputter chamber view from left. Figure 4: Sputter chamber view from right. 1.6.2 Venting the Chamber. All gases and plasma must be off before ...
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www.advanced-energy.com/upload/File/White_Papers/SL-WHITE5-270-01.pdf
THE SPUTTERING ENVIRONMENT. Figure 1 is a diagram of a simple sputtering chamber. A power supply is connected so that a low pressure gas is ionized ...
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beach.mit.edu/archives/487
For the deposition of metal and insulator films, we have several sputter chambers . Their features include: Nanometer-scale thickness control; High-vac ... |
