iopscience.iop.org/0960-1317/15/8/023
In this work, we report low temperature (<250 ˇăC) RF sputter deposition of silicon films for MEMS applications. The films were deposited in argon atmosphere in ... |
www.americanelements.com/simst.html
Certified high purity 7440-21-3, Silicon Sputtering Target bulk & lab quantity manufacturer. Annual production contracts & credit cards accepted. Research ... |
www.spm.li/english/sputtering-targets/silicon/
SPM offers mono- and polycrystalline Silicon sputtering targets in various sizes and shapes. Flat surfaces can be polished, domes and lenses can be shaped.
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www.advanced-energy.com/upload/File/White_Papers/SL-WHITE4-270-01.pdf
Enter power supplies. Comprising 15-20 percent of the total cost of a vacuum coating system, the power supply is one of the highest-ticket items in the system. |
www.roguevalleymicro.com/SputteredSilicon.php
Sputtered silicon has a refractive index of over 3.8, silicon is widely used as an ... Our sputtered silicon can also prevent the oxidation of metals, like copper and ...
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www.springerlink.com/index/cl304l52143t6j23.pdf
Key words: Deposited silicon films, sputter, oxidation, grain boundary, annealing, doped silicon films, film shrinkage. I. INTRODUCTION. Polycrystalline silicon ...
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www.goodfellow.com/E/Silicon-Sputtering-Target.html
Buy Silicon Sputtering Target on-line ... Silicon was discovered in 1824 by J.J. Berzelius in Stockholm, Sweden. After carbon, silcon is the most abundant ...
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www.ee.washington.edu/research/microtech/cam/SOP/Sputtering/Sputtering SOP.doc
Micro-fabrication Recipe: Sputtering of dielectric material. Jiandong Fang and Rob MacDonald, 2001. Tai Chen, Sarah McQuaide, Rev. A, 2006 ...
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tolik.sciencedom.com/publications/papers/pdf_papers/2005_Jun_Characterisation.pdf
To overcome deficiencies of sputtered silicon dioxide (SiO2) films the. RF magnetron sputtering process was optimised using a full factorial design of experiment ...
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www.sciencedirect.com/science/article/pii/S0169433204002557
Jun 15, 2004 ... Molecular dynamics simulations of Si(0 0 1) targets subject to uninterrupted Ar bombardment of various energies and angles of incidence were ... |
