www.roguevalleymicro.com/SputteredSiliconNitride.php
Sputtered silicon nitride can be used as an antireflective coating or passivation layer and is a good alternative to our other deposited nitrides. Adding sputtered ...
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www.sciencedirect.com/science/article/pii/S0040609003020212
It is presented the effect of the reactive and non-reactive sputtering preparation, as well as, the atomic composition on the electrical properties and conducti.
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jes.ecsdl.org/content/131/12/2928.abstract
Abstract. Films 100¨C200 nm thick have been deposited at 200¡ãC by reactive sputtering of a silicon target in nitrogen©\argon mixtures using an RF planar ...
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adsabs.harvard.edu/abs/1994TSF...253..425H
Properties of silicon nitride films prepared by magnetron sputtering. Authors: Hirohata, Y.; Shimamoto, N.; Hino, T.; Yamashima, T.; Yabe, K. Affiliation: ...
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www.springerlink.com/index/b8478w85733g6583.pdf
strates. To explore the RF-sputtered silicon nitride film as a structural material in MEMS ... Key words: RFsputtering, silicon nitride, structural material, surface ...
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www.lesker.com/newweb/deposition_materials/depositionmaterials_sputtertargets_1.cfm?pgid=si7
Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will ...
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www.goodfellowusa.com/A/Silicon-Nitride-Hot-pressed-Sputtering-Target.html
Silicon Nitride - Hot-pressed ( Si3N4 ) - Sputtering Target - Material Information ... Hot pressing of Silicon Nitrideproduces a material of virtually zero porosity.
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www.sidrabe.com/assets/files/Protective Properties of Silicon Nitride.pdf
Protective Properties of Silicon Nitride,. Deposited by Bias Reactive Sputtering. Y. Lipin, and E. Machevski, J/S Co. Sidrabe, Latvia. Key Words: Magnetron ...
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www.opticsinfobase.org/viewmedia.cfm?uri=ao-23-1-161&seq=0
sputtered silicon nitride. G. Eisenstein and L. W. Stulz. Single-layer antireflection ( AR) coating films are used to transform semiconductor injection lasers into dif- ...
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www.ee.washington.edu/research/microtech/cam/SOP/Sputtering/Sputtering SOP.doc
Note: when sputtering silicon nitride, add Argon and Nitrogen in the proportions shown with throttle valve at 0%, then open the throttle valve until there is ... |
