www.nano.iisc.ernet.in/RF sputtering manual_2010.pdf
Mar 1, 2010 ... RF Magnetron Sputtering system. Make: Anelva Sputtering Unit Model SPF-332H . Centre for Excellence in Nano-Electronics. Indian Institute of ...
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apl.aip.org/resource/1/applab/v82/i7/p1117_s1
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more ...
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etd.ohiolink.edu/send-pdf.cgi/Maqbool Muhammad.pdf?ohiou1127411237
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www.wisegeek.com/what-is-rf-magnetron-sputtering.htm
Radio frequency magnetron sputtering, also called RF magnetron sputtering is a process that is used to make thin film. This process is useful for making thin ...
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iopscience.iop.org/0022-3727/45/13/135101
Zinc nitride films were deposited on glass or silicon substrates by reactive magnetron RF sputtering of zinc in N2¨CAr ambient. The deposition conditions were ...
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ieeexplore.ieee.org/iel5/10100/32360/01511390.pdf?arnumber=1511390
ZnO Films Deposited by RF Magnetron Sputtering. Jing Li, SuntaoWu and Junyong Kang?. Pen-Tung Sah MEMS Research Center and Department of Physics ...
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www.cpii.com/docs/related/2/Mag tech art.pdf
A magnetron is a high power microwave oscillator in which the potential energy of an electron cloud near the cathode is converted into r.f. energy in a series of ... |
web.utk.edu/~prack/MSE 300/sputteringtotal.pdf
Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications. Philip D. Rack, Jason D. Fowlkes, and Yuepeng Deng ...
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www.mems-exchange.org/catalog/P1998/
The electrodes are driven by an RF power source, which generates a plasma and ionizes the gas (e.g., argon) between the electrodes. A DC potential is used ...
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www.nanotech.ucsb.edu/index.php?option=com_content&view=article&id=93:six-target-dcrf-magnetron-sputtering-system-
Equipment Description: Six-Target DC/RF Magnetron Sputtering System. Manufacturer: AJA International 809 Country Way North Scituate, MA 02060 . |
