www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputtertech.html
RF Sputter Deposition. schematic of RF sputtering. Good for insulating materials. in DC systems, positive charge builds up on the cathode (target). need 1012 ...
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www.wfu.edu/~ucerkb/Nan242/L08-Sputtering_b.pdf
RF Sputtering. ? Instead of applying a DC voltage to the cathode, apply a voltage oscillating at radio frequency ( RF), typically around 13.5 MHz. ? The RF peak to ...
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www.wisegeek.com/what-is-rf-sputtering.htm
Jul 9, 2012 ... Like direct current (DC) sputtering, RF sputtering involves running an energetic wave through an inert gas to create positive ions. The target ...
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www.ajaint.com/rfdc.htm
AJA International, Inc. Designing custom, quality sputtering and thin film ... AJA International, Inc. offers DC and RFpower supplies from 100W to 40kW. |
www.cnf.cornell.edu/cnf5_tool.taf?_function=detail&eq_id=124
Both RF and DC magnetron sputtering are available. Materials can be co- deposited from two sources onto the rotating substrate. Eight-inch sputtering targets ...
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www.ajaint.com/whatis.htm
Although SPUTTERING as described above seems relatively intuitive, ... RF, DC, MW) is required to "feed" and thus maintain the plasma state while the plasma ...
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www.nanotech.ucsb.edu/index.php?option=com_content&view=article&id=93:six-target-dcrf-magnetron-sputtering-system-
Equipment Description: Six-Target DC/RF Magnetron Sputtering System. Manufacturer: AJA International 809 Country Way North Scituate, MA 02060 ...
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www.angstromengineering.com/sputter_deposition.html
Sputter systems can be configured with RF, DC, pulsed DC, or MF power supplies. Specifically configured sources make sputtering magnetic materials such as ...
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www.stanford.edu/class/ee311/NOTES/Deposition_Planarization.pdf
The commonly used techniques for sputtering the target material are: i) radio frequency (rf) sputtering and ii) magnetron sputtering (rf or dc). In a rf sputtering ...
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www.nano.iisc.ernet.in/RF sputtering manual_2010.pdf
Mar 1, 2010 ... sputtering chamber of this system is 2x10-5 milli bar. Magnetron sputtering can be done either in DCor RF modes. DC sputtering is done with ... |
