en.wikipedia.org/wiki/Sputter_deposition
In reactive sputtering, the deposited film is formed by chemical reaction between the target material and a gas which is ...
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www.advanced-energy.com/upload/File/Reprints/Effective_Control_for_Reactive_Sput_Processes.pdf
Reactive Sputteringˇ± for a review of ... regions formed during reactive sputtering. ... Figure 3.Arcs in dielectricreactive sputtering can increase exponentially.
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www.alacritas-consulting.com/advice/reactive-sputtering-for-compound-thin-films/
Reactive sputtering for compound thin films The sputtering process is often used to deposit metal thin films. To make sputtered metal thin films we ju.
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www.reactivesputtering.com/
Welcome to Reactive Sputtering, Inc. (RSI), a source for information about reactive sputtering and equipment for controlling the reactive gas partial pressure ...
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Reactive sputtering is a process in which a metal is sputtered in argon containing a small partial pressure of a reactive gas such as O2 or N2. The active gas ...
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www.iupac.org/publications/pac/66/6/1311/pdf/
and nitrides by reactive sputtering are considered. These techniques ... Examples of the use of reactive unbalanced magnetron sputtering for the preparation of ...
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www.springer.com/materials/surfaces interfaces/book/978-3-540-76662-9
In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive ...
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www.huettinger.com/en/solutions/plasma-excitation/reactive-sputtering.html
This page explains the difference between "reactive sputtering" and "normal sputtering".
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books.google.com/books/about/Reactive_Sputter_Deposition.html?id=EtyA1UooZ3kC
The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 ...
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www.azom.com/article.aspx?ArticleID=4167
Apr 17, 2008 ... Reactive Sputtering is used to produce functional coatings having properties that are suitable for a range of applications such as decorative, ... |
