www.plansee.com/en/719.htm
Reactive magnetron sputtering. Hard material coatings and decorative coatings based on aluminium, titanium, zirconium, chromium and ceramics are applied ...
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www.helmholtz-berlin.de/forschung/enma/solare-brennstoffe/analytische-methoden/reaktives-magnetron-sputtern_en.html
Sep 20, 2012 ... Reactive magnetron sputtering of layers for thin layer solar cells. For the production of thin film solar cells cost-effective techniques scalable to ... |
en.wikipedia.org/wiki/Sputter_deposition
3.1 Ion-beam sputtering; 3.2 Reactive sputtering; 3.3 Ion-assisted deposition; 3.4 High-target-utilization sputtering; 3.5 High-power impulse magnetron sputtering ...
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ia.physik.rwth-aachen.de/research/sputtering/www-sputter-eng.pdf
1 The reactive DC-Magnetron Sputtering Pro- cess. In our institute the optical functional coatings are produced in a dc-magnetron sputter process. This process ...
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www.gencoa.com/download/gpd_09_-_uniformity_control_in_reactive_magnetron_sputtering.pdf
1 www.gpd.fi. GLASS PERFORMANCE DAYS CHINA 2009. 中国玻璃深加工研讨 会. Introduction. Any control process relies on 3 key elements [1]: ? sensors, with ...
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home.zcu.cz/~crowley/BC/Bc - materialy/magnetrony/! Safi--Recent aspects concerning DC reactive magnetron sputtering of thin films a review.pdf
In this paper, attention is paid to DC reactive magnetron sputtering and its implications, ... Keywords: Thin film; Reactive sputtering; Magnetron; Hysteresis effect; ...
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www.miics.net/archive/getfile.php?file=85
I. Physikalisches Institut der RWTH Aachen, 52056 Aachen, Germany. The reactive magnetron sputtering process is widely used for the production of oxide and ...
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m-hikari.com/atam/atam2012/atam1-4-2012/jasimATAM1-4-2012.pdf
Adv. Theor. Appl. Mech., Vol. 5, 2012, no. 1, 1 - 10. A Plasma Emission Controller for Reactive. Magnetron Sputtering of Titanium Dioxide Films. Raad A. Swady ...
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jap.aip.org/resource/1/japiau/v71/i3/p1421_s1
This paper deals with the reactive sputtering of titanium in an argon and oxygen mixture. The variation in cathode potential as a function of oxygen partial ... |
home.icpf.cas.cz/podrazky/Share/tsf351.pdf
ITO coating by reactive magnetron sputtering±comparison of properties from DC and MF processing. C. May*, J. Stru?mpfel. Von Ardenne Anlagentechnik ... |
