iopscience.iop.org/1367-2630/7/1/090/fulltext/
Apr 6, 2005 ... Pulsed dc magnetron reactive sputtering of dielectrics provides a deposition process without arcing. The deposition process is usually carried ...
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home.zcu.cz/~crowley/BC/Bc - materialy/magnetrony/Arnell - Recent developments in pulsed magnetron sputtering.pdf
Oct 18, 2004 ... The effects of applying mid-frequency (100¨C350 kHz) pulsed dc power ... Keywords: Pulsed magnetron sputtering; Ion current; Pulse frequency ...
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www.sciencedirect.com/science/article/pii/S0169433211013766
Nov 1, 2011 ... Pulsed dc magnetron sputtering (PDMS) with a cylindrical rotating target was employed for GZO TCO film. ? It exhibits proper electrical and ...
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www.fke.utm.my/elektrika/dec07/paper4dec07.pdf
Keywords: Magnetron sputtering system, Pulsed-DC power supply, Thin film synthesis. 1. ... A key component of apulsed-dc magnetron sputtering system is a ...
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www.jim.or.jp/journal/e/pdf3/49/09/2082.pdf
CrAlN films were prepared by a pulsed DC magnetron sputtering in FTS mode with Cr-Al alloy targets (Cr/Al = 30 at%/70 at%) in a mixed atmosphere of Ar and ...
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www.icpig.uni-greifswald.de/proceedings/data/Vlcek_1
1. Reactive pulsed dc magnetron sputtering. In the last decade, great attention has been devoted to a reactive pulsed dc magnetron sputtering [1¨C. 5]. The main ...
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usir.salford.ac.uk/19232/1/Sreejith_Karthikeyan_-_CMMP11.pdf
Investigation of pulsed D C magnetron sputtering for the .... S. Karthikeyan et al, Nano-structured features ofpulsed d.c magnetron sputtered Mo films for ...
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www.jmst.org/EN/article/downloadArticleFile.do?attachType=PDF&id=5589
Sci. Technol., Vol.20 No.1, 2004. 31. Photocatalytic Property of TiO2 Films Deposited by Pulse. DC Magnetron Sputtering. Wenjie ZHANG, Shenglong ZHU, Ying ...
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journals.cambridge.org/production/action/cjoGetFulltext?fulltextid=8009174
Abstract. TiO2 thin films (500 ¨C 1000 nm in thickness) were deposited using pulsed DC magnetron reactivesputtering, on glass substrates. The depositions used ...
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usir.salford.ac.uk/19231/1/S._Karthikeyan_2nd_CSE.pdf
Novel low temperature pulsed d.c. magnetron sputtering of single phase ¦Â-In2S3 buffer layers for. CIGS solar cellapplication. Sreejith Karthikeyan, Arthur E Hill, ... |
