www.anatechusa.com/planar-magnetron-sputtering
Planar Magnetron Sputtering. ... Typical Applications for Sputtering: Renewable Energy, Materials Research, Microelectronics, CV Dot Matrix, Medical Devices, ...
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www.directindustry.com/prod/angstrom-sciences/planar-magnetrons-for-ion-sputtering-22021-50575.html
Discover all the information about the product: Planar magnetron for ion sputtering . Contact the manufacturer directly to receive a quote and to find out where to ... |
jasosx.ils.uec.ac.jp/BJP/pdf/BJP1991/BJP_1991_1/BJP_1991_1-063.pdf
OF. ENERGIES DISTRIBUTION AT THE CATHODE. PLANAR MAGNETRON SPUTTERING SYSTEM. D. Czekaj. E. K. Hollman. V. A. O. Zaitsev*. A. Chernakova.
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ieeexplore.ieee.org/iel5/4915518/4952854/04952860.pdf?arnumber=4952860
earlier, both rf and dc planar magnetron sputtering were being used in daily ... MAGNETS. FIG. 2. Circular and rectangular planar magnetron sputtering sources .
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www.nano.iisc.ernet.in/RF sputtering manual_2010.pdf
Mar 1, 2010 ... Anelva SPF-322H sputtering system, shown in fig.1 is equipped with three. 3-inch diameter planar magnetron cathodes to facilitate multi layers ...
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kaoduen.com.tw/fckeditor/editor/filemanager/connectors/php/MAK catalog.pdf
permitting the manufacture and distribution of patented Planar. Magnetron Sputter Sources. With over 6,000 sources delivered throughout the world, US Inc. has ...
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www.pazam-tech.co.il/pvd/PVD_Products_Titan_Planar_Magnetron_3-inch_Sputter_Source_.pdf
Titan Planar Magnetron. 3-inch Sputter Source. PVD Products offers a full line of Titan planar magnetron sputtersources for your specific sputter deposition ...
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jap.aip.org/resource/1/japiau/v54/i11/p6601_s1
Ferroelectric films of lead zirconate titanate (PZT) have been fabricated by rf planar magnetron sputtering. Films having a resistivity >106 ¦¸ cm and a dielectric ...
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www.sciencedirect.com/science/article/pii/S0042207X09003959
Sep 18, 2009 ... The dependence of the magnetic flux density, erosion uniformity, and target utilization on the yoke magnet tilt angle was investigated in a ...
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langmuir.raunvis.hi.is/~tumi/ps/dcm_ivc17_stockholm.pdf
A typical dc planar magnetron sputtering discharge operates at a pres- sure of 1 ¨C 10 mTorr with a magnetic field strength of 0.01 ¨C 0.05 T and cathode potentials ... |
