en.wikipedia.org/wiki/Sputter_deposition
Ion-beam sputtering (IBS) is a method in which the target is external to the ion source. A source can work without ...
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www.southbaytech.com/appnotes/91 Ion Beam Sputtering Practical Applications to Electron Microscopy.pdf
The Model IBS/e is a tabletop ion beam sputter deposition system designed to utilize the advantages of ion beam sputtering and produces ultra-fine grain films of ...
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www.testbourne.com/instruments/sbt-products/24/Ion-Beam-Sputter-Deposition-and-Etching-System/
Ion Beam Sputter Deposition and Etching System Model IBS/e. The Model IBS/e is a high vacuum thin film deposition system designed to precisely deposit ...
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www.sematech.org/meetings/archives/litho/7870/proceedings/posters/Multilayer_MC/03-MC-48 Gawlitza_Fraunhofer P.pdf
Ion beam sputter deposition (IBSD) is considered to be the appropriate technology for the coating of Mo/Si multilayers on mask substrates. However IBSD not ...
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www.4waveinc.com/ibd.html
Ion beam deposition (IBD) uses an energetic, broad beam ion source carefully focused on a grounded metallic or dielectric sputtering target. Material sputtered ...
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www.oxfordplasma.de/process/opt_coat.htm
The process of Ion beam sputter deposition produces sputtered atoms with high average energy. Films made from these atoms show improved properties and ...
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www.iws.fraunhofer.de/en/business_fields/pvd_nanotechnology/xray_euv_optics/technologies/precision_coating/ion-beam-sputter-deposition.html
Ion Beam Sputter Deposition (IBSD); Magnetron Sputter Deposition (MSD) ... Ion beam sputtering equipment for nanometer precision coating- and etching ...
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digitalcommons.unl.edu/cgi/viewcontent.cgi?article=1000&context=electricalengineeringfacpub
Interfacial Electrical Properties of Ion- Beam Sputter. Deposited Amorphous Carbon on Silicon. A. Azim Khan. University of Nebraska - Lincoln. John A. Woollam ...
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www.fis.cinvestav.mx/~smcsyv/supyvac/8/sv800199.pdf
Ion beam Sputter deposition (IBSD) has been under development for a number of years due to the flexibility it provides in the deposition of novel thin film ...
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www.emsdiasum.com/microscopy/products/materials/plasma.aspx
Ion Beam Sputter Deposition and Etching System arrow12 Ion Beam Sputter Deposition and Etching System Model IBS/e. The Model IBS/e is a high vacuum thin ... |