isofluxinc.com/wp-content/uploads/2011/10/Principles-and-Applications-of-Hollow-Cathode-Magnetron-Sputtering-Sources.pdf
ABSTRACT. Hollow cathode magnetron sources, also known as inverted magnetrons, sputter material from the inside surfaces of cy- lindrical targets.
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www.sbfisica.org.br/bjp/files/v36_332.pdf
deposition of AlN thin films at low temperatures has become increasingly important and valuable. Hollow cathodemag- netron (HCM) sputtering technique is ...
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en.wikipedia.org/wiki/Hollow-cathode_lamp
Hollow-cathode lamps from an atomic absorption spectrometer ... The buffer gas ions will then be accelerated into the cathode, sputtering off atoms from the ...
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mnx.pppl.gov/docs/wang1999jvsta.pdf
A new type of plasma sputtering device, named the hollow cathode magnetron ( HCM), has been developed by surrounding a planar magnetron cathode with a ...
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epsppd.epfl.ch/StPetersburg/PDF/P1_082.PDF
Schematic diagram of the cavity- hollow cathode. Characterisation of a Cavity- Hollow Cathode as Plasma-Assisted Sputtering Source. I. Teliban1, P. Balan2, ...
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www.youtube.com/watch?v=kt9YQ21FwWU
Oct 31, 2011 ... Hollow Cathode Magnetron Part 2by PalmieriProfEnzo4,010 views; Fully refurbished and upgraded Perkin-Elmer Sputtering Deposition ...
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ieeexplore.ieee.org/iel5/4915518/4951866/04951888.pdf?arnumber=4951888
Hollow cathode sputtering, wherein substrates are mounted on the axis of an elongated tubular source, provides an attractive method for coating objects of ...
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rsi.aip.org/resource/1/rsinak/v73/i11/p3841_s1
In order to address some of these issues, we have developed a new hollow cathode sputtering (HCS) source. In addition to the inherent advantages of high ...
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alexandria.tue.nl/extra2/672762.pdf
Sputtering Hollow Cathode Discharges designed for Laser Applications;. Experiments and Theory. PROEFSCHRIFT ter verkrijging van de graad van doctor ...
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ieeexplore.ieee.org/iel5/4059527/4059528/04059630.pdf?arnumber=4059630
REACTIVE-ENVIRONMENT HOLLOW CATHODE SPUTTERING: COMPOUND FILM PRODUCTION,. AND APPLICATION TO THIN FILM PHOTOVOLTAICS ... |
