www.ajaint.com/whatis.htm
The "diode sputtering" example given above has proven to be a useful technique in the deposition of thin films when the cathode is covered with source material ...
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www.ipm.virginia.edu/newpeople/wadley/PDF/Reactor_Scale_Models_for_RF_Diode_Sputtering.pdf
ting rf diode sputtering/deposition for fabricating thin metal films, for example ... describe the rf diode sputteringprocess for metal thin-film fabrication and the ...
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www.arl.psu.edu/mm_mp_ac_sputtering.php
The simplest sputtering system is the direct current diode system (dc diode). ... The original diode sputteringsystems have mostly been replaced in ceramic ...
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engineering.dartmouth.edu/microeng/courses/es194/student/jiaying/sem/II.2.p2.html
DC Diode Sputtering. Deposition pressure : 0.5 to 10 Pa ( 5*10^-3 to 0.1 torr); Deposition rate : 0.02 to 0.2 E-6 m/min; Depostion temperature : 100 to 300 C ...
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www.sciencedirect.com/science/article/pii/004060909090293M
Jul 15, 1990 ... A review of r.f. sputtering principles is presented with reference to recent plasma models and sample calculations. Typical modern sputtering ...
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www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputtertech.html
DC (diode); RF (radio frequency); magnetron ... schematic of DC sputtering ... increases with increasing sputtervoltage; decreases with increasing substrate bias ...
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www.tandfonline.com/doi/abs/10.1080/00150199008224625
Abstract In a diode sputtering apparatus, high Tc superconductor films of the types YBa2Cu30x and BiSrCaCuO were produced. In the case of these materials , ...
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bama.ua.edu/~phx34/SP04/09SputterDeposition.ppt
Although the basic diode sputtering method (without magnetron or magnetic enhanced) is still used in some application areas, magnetron sputtering now serves ...
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www.etafilm.com.tw/PVD_Sputtering_Deposition.html
DC Sputtering (Planar Diode Sputtering) : Using target as cahode and substrate as anode, pump the vaccum to 10-3Pa, fill argon gas, apply 1000~V Voltage.
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www2.intota.com/experts.asp?strSearchType=all&strQuery=diode sputtering
Experts available for diode sputtering consulting, expert witness, or analyst services for business, legal, and technical professionals. |
