ia.physik.rwth-aachen.de/research/sputtering/www-sputter-eng.pdf
1 The reactive DC-Magnetron Sputtering Pro- cess. In our institute the optical functional coatings are produced in a dc-magnetron sputter process. This process ...
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www.uccs.edu/~tchriste/courses/PHYS549/549lectures/sputtertech.html
Magnetron Sputter Deposition. use with DC or RF; goal: increase ionization of Ar; Why? Higher sputter rates at lower Ar pressures (down to 0.5 mTorr). fewer gas ...
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www.nanotech.ucsb.edu/index.php?option=com_content&view=article&id=93:six-target-dcrf-magnetron-sputtering-system-
Equipment Description: Six-Target DC/RF Magnetron Sputtering System. Manufacturer: AJA International 809 Country Way North Scituate, MA 02060 ...
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en.wikipedia.org/wiki/Sputter_deposition
A magnetron sputter gun showing the target-mounting surface, the vacuum ... In a study on metallic layers prepared by DC sputtering, he extended the structure ...
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www.msi-pse.com/magnetron_sputtering.htm
Jun 11, 2012 ... The above illustration describes a generic manifestation of a magnetron sputtering source. DC, pulsed DC, AC and RF power supplies may be ... |
www.wisegeek.com/what-is-dc-magnetron-sputtering.htm
DC magnetron sputtering is one of several types of sputtering, which is a method of physical vapor deposition of thin films of one material onto another material.
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www.mems-exchange.org/catalog/P2621/
Titanium/nickel DC-magnetron sputtering: View. Process Hierarchy. Bonding กค Clean ... on front. 1 Titanium/nickelDC-magnetron sputter. Material, titanium/ nickel ...
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www.cnf.cornell.edu/cnf5_tool.taf?_function=detail&eq_id=124
Both RF and DC magnetron sputtering are available. Materials can be co- deposited from two sources onto the rotating substrate. Eight-inch sputtering targets ...
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www.alibaba.com/showroom/dc-magnetron-sputtering.html
102 Products ... Dc Magnetron Sputtering, Source Dc Magnetron Sputtering ...
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www.zju.edu.cn/jzus/opentxt.php?doi=10.1631/jzus.2006.A0472
Dec 3, 2005 ... Abstract: Optimal parameters for depositing Titanium nitride (TiN) thin films by DC reactivemagnetron sputtering were determined. TiN thin films ... |
