ia.physik.rwth-aachen.de/research/sputtering/www-sputter-eng.pdf
1 The reactive DC-Magnetron Sputtering Pro- cess .... 2 The Sputter System. All optical coatings under investigation were prepared utilizing a sputter system ...
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www.utdallas.edu/~gpp052000/Docs/AJA1500_Manual.pdf
Jan 27, 2006 ... Sputter System; UTD Cleanroom Tool ID: MS03. This tool is used ... sputter guns areDC-magnetrons and two are RF-magnetrons. In addition to ...
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www.semicore.com/
Semicore: Thin Film Deposition Equipment & PVD Sputtering Systems ... Deposition PVD coating technology ¨C DC Magnetron sputtering, RF sputtering, Electron ...
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www.henniker-scientific.com/index.php/vacuum-and-uhv-surface-analysis/64-custom-vacuum-and-thin-film-deposition-systems-for-pvd-and-mbe/104-pvd-magnetron-sputtering-systems-sputter-deposition-systems
Our thin film magnetron sputter deposition systems represent the very latest concept in cost effective R&D ...Magnetron Sputter Deposition (RF, DC, Pulsed DC) ...
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www.ajaint.com/whatis.htm
RF, DC, MW) is required to "feed" and thus maintain the plasma state while the plasma ... A sputtering systemconfiguration where multiple magnetron sputtering ...
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www.nanotech.ucsb.edu/index.php?option=com_content&view=article&id=93:six-target-dcrf-magnetron-sputtering-system-
Equipment Description: Six-Target DC/RF Magnetron Sputtering System. Manufacturer: AJA International 809 Country Way North Scituate, MA 02060 ...
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www.directvacuum.com/PDF/what_is_sputtering.pdf
is known as a magnetron sputtering system. The main difference between this and a basic DC sputtering systemdescribed above is the addition of a strong ...
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www.pvdproducts.com/products/magnetron.aspx
Manufacturers of magnetron sputter sources, plannar magnetron sputtering sources, and custom magnetron sputtering deposition systems. ... HV and UHV magnetrons for various target sizes. We also make RF/DC andDC/DC switches ( PDF).
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en.wikipedia.org/wiki/Sputter_deposition
A magnetron sputter gun showing the target-mounting surface, the vacuum feedthrough, the ... In a study on metallic layers prepared by DC sputtering, he extended the structure zone ... "High-rate low kinetic energy gas-flow-sputteringsystem".
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www.hhv.in/rfdc-magnetron-sputtering-systems
RF/DC Magnetron sputtering systems. HHV's range of vacuum sputtering systems. We collaborate with you to design a system that solves your exact thin film ... |
