AL2O3 Thin Film

1. [PDF] 

   Phase control of Al2O3 thin films grown at low ... - zp¨§t na home.zcu.cz

   home.zcu.cz/.../Andersson%20-...

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   by JM Andersson - 2006 - Cited by 26 - Related articles
   Phase control of Al2O3 thin films grown at low temperatures. J.M. Andersson a. , E. Wallin a. , U. Helmersson a,?. , U. Kreissig b. , E.P. M¨¹nger c a Plasma and ...
   
2. Domain epitaxy in TiO2/¦Á-Al2O3 thin film heterostructures with ...

   apl.aip.org ? SURFACES AND INTERFACES

   by MR Bayati - 2012 - Cited by 1 - Related articles
   Rutile TiO2 films were grown epitaxially on ¦Á-alumina (sapphire(0001)) substrates and characterized by x-ray diffraction and scanning transmission electron ...
   
3. [PDF] 

   Magnetron Sputtered nc-Al/-Al2O3 Nanocomposite Thin Films for ...

   www3.ntu.edu.sg/mae/Research/.../Thinfilms/.../09Jnn00-MP02.pdf

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   by Y Li12 - 2009 - Cited by 3 - Related articles
   In this paper, we developed nc-Al/a-Al2O3 nanocomposite thin films using magnetron sputtering. ... well as insulating.1¨C4 Al2O3 thin films can be synthesized ...
   
4. [PDF] 

   Alumina Thin Films From Computer Calculations to ... - DiVA Portal

   www.diva-portal.org/smash/get/diva2:114053/FULLTEXT01

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   by E Wallin - 2008 - Cited by 1 - Related articles
   alumina thin films. Alumina, Al2O3, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. However, controlling thin film ...
   
5. [PDF] 

   Optical properties of Al2O3 thin films grown by atomic layer deposition

   www.ece.eng.wayne.edu/~avrutsky/Publications/PDFs/AO2009.pdf

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   by P Kumar - 2009 - Cited by 5 - Related articles
   Optical properties of Al2O3 thin films grown by atomic layer deposition. Pradeep Kumar,1,* Monika K. Wiedmann,2 Charles H. Winter,2 and Ivan Avrutsky1 ...
   
6. [PDF] 

   Characteristics of an Al2O3 Thin Film Deposited by a Plasma ...

   eml.kim.or.kr/On_line/admin/files/17-21.pdf

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   by S Lee - Cited by 5 - Related articles
   Several properties of ultra thin aluminum oxide films deposited by a plasma enhanced atomic layer deposition. (PEALD) method were studied. The Al2O3 films ...
   
7. [PDF] 

   Production of Al2O3 Thin films for FET and MOSFET Transistor Gate ...

   web.firat.edu.tr/iats/cd/subjects/Metallurgy.../MSM-119.pdf

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   by B G¨¹nd¨¹z - Related articles
   characterization of Al2O3 thin films deposited by sol-gel technique. The optical ...properties of the Al2O3 thin films spin-coated on glasses were investigated by ...
   
8. [PDF] 

   Title Formation process of Al2O3 thin film by reactive sputtering ...

   https://kitir.lib.kitami-it.ac.jp/dspace/bitstream/.../187_ISSP_Chiba.pd...

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   by Y Chiba - 2007 - Cited by 6 - Related articles
   Formation process of Al2O3 thin film by reactive sputtering. Y. Chiba, Y. Abe, K. Sasaki and M. Kawamura, Department of Materials Science,. Kitami Institute of ...
   
9. Formation process of Al< sub> 2 O< sub> 3 thin film by reactive ...

   www.sciencedirect.com/science/article/pii/S0042207X08002327

   by Y Chiba - 2008 - Cited by 6 - Related articles
   Oct 15, 2008 ¨C Al and Al2O3 films were deposited by RF magnetron sputtering using a mixed gas of Ar and O2. The surface of the Al target was changed from ...
   
10. [PDF] 

    Preparation of Al2O3 Thin Films by Atomic Layer ... - EaseChem.com

    pdf.easechem.com/pdf/.../87bd36fe-5ff0-428d-8f9f-647c0793a678....

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    by KS An - 2003 - Cited by 10 - Related articles
    Al2O3 thin films were grown on H terminated Si(001) substrates using dimethylaluminum isopropoxide ... Growth of stoichiometric Al2O3 thin films with carbon ..